A groundbreaking new silicon resonant high-pressure microsensor has been developed, offering unprecedented accuracy and resolution for oceanographic and petroleum industry applications.
This innovative sensor utilizes volume compressed sensing with dual resonators supported by micro beams. The frequency of the resonators shifts under high pressure, enabling precise measurements.
Researchers modified the micro beams to achieve different pressure sensitivities, allowing for effective temperature self-compensation. The sensor boasts an accuracy better than 0.01% FS and a rapid response time.
This advancement promises to significantly enhance the precision of high-pressure measurements in various fields. Its ability to operate across a wide pressure and temperature range marks a major leap forward in sensor technology.